Lieberman, M. A. <br/><br/>
Principles of plasma discharges and materials processing / 
Michael A. Lieberman and  Allan J. Lichtenberg. 
 - second edition. 
 - Hoboken, N.J. :  Wiley-Interscience,  2005. 
 - xxxv, 757 pages :  illustration ;  25 cm. 
<br/><br/>Includes bibliographical references (p. 735-748) and index. 
<br/><br/><label>ISBN: </label>9780471720010 :  US$174.00 
<br/><br/><label>LCCN: </label>2004058503 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma dynamics.<br/>Thin films--Surfaces.<br/>Plasma etching.<br/>Plasma chemistry--Industrial applications.