TY  - BOOK
AU  - Lieberman,M.A.
AU  - Lichtenberg,Allan J.
TI  - Principles of plasma discharges and materials processing
SN  - 9780471720010 :
PY  - 2005///
CY  - Hoboken, N.J.
PB  - Wiley-Interscience
KW  - Plasma dynamics
KW  - Thin films
KW  - Surfaces
KW  - Plasma etching
KW  - Plasma chemistry
KW  - Industrial applications
N1  - Includes bibliographical references (p. 735-748) and index
ER  -