Principles of plasma discharges and materials processing / (Record no. 15652)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00983cam a2200265 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | 0000030592 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20230921140137.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 041013s2005 njum b a001 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 2004058503 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780471720010 : |
| Terms of availability | US$174.00 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Lieberman, M. A. |
| Fuller form of name | (Michael A.) |
| 245 10 - TITLE STATEMENT | |
| Title | Principles of plasma discharges and materials processing / |
| Statement of responsibility, etc. | Michael A. Lieberman and Allan J. Lichtenberg. |
| 250 ## - EDITION STATEMENT | |
| Edition statement | second edition. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Hoboken, N.J. : |
| Name of publisher, distributor, etc. | Wiley-Interscience, |
| Date of publication, distribution, etc. | 2005. |
| 264 ## - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Place of production, publication, distribution, manufacture | Hoboken, N.J. : |
| Name of producer, publisher, distributor, manufacturer | Wiley-Interscience, |
| Date of production, publication, distribution, manufacture, or copyright notice | 2005 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xxxv, 757 pages : |
| Other physical details | illustration ; |
| Dimensions | 25 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references (p. 735-748) and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma dynamics. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Thin films |
| General subdivision | Surfaces. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma etching. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma chemistry |
| General subdivision | Industrial applications. |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Lichtenberg, Allan J. |
| 989 ## - | |
| -- | 20230822095114.0 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Copy number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Chinhoyi University of Technology Libraries | Chinhoyi University of Technology Libraries | 09/21/2023 | QC 718.5 PRI | BK0051239 | 09/21/2023 | c.043063 | 09/21/2023 | Books |