Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar.
Material type: TextPublisher: Waltham, USA : Elsevier, WA, William Andrew is an imprint of Elsevier, 2014Copyright date: ©2014Edition: First editionDescription: x, 603 pages : illustrations ; 25 cmISBN:- 9780815515937 :
- 0815515936
- 621.381 22
- TK7874 .S275 2014
- TK7874 .S275 2014
Item type | Current library | Home library | Call number | Copy number | Status | Date due | Barcode |
---|---|---|---|---|---|---|---|
Books | Chinhoyi University of Technology Libraries | Chinhoyi University of Technology Libraries | TK 7874 SAK (Browse shelf(Opens below)) | c.046327 | Available | BK0052426 |
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Includes bibliographical references and index.
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