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Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar.

By: Material type: TextTextPublisher: Waltham, USA : Elsevier, WA, William Andrew is an imprint of Elsevier, 2014Copyright date: ©2014Edition: First editionDescription: x, 603 pages : illustrations ; 25 cmISBN:
  • 9780815515937 :
  • 0815515936
Subject(s): DDC classification:
  • 621.381 22
LOC classification:
  • TK7874 .S275 2014
  • TK7874 .S275 2014
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