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Principles of plasma discharges and materials processing / Michael A. Lieberman and Allan J. Lichtenberg.

By: Contributor(s): Material type: TextTextHoboken, N.J. : Wiley-Interscience, 2005Edition: second editionDescription: xxxv, 757 pages : illustration ; 25 cmISBN:
  • 9780471720010 :
Subject(s):
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Includes bibliographical references (p. 735-748) and index.

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